Design of a new type of high-speed scanning galvanometer structure and scanning control strategy

Traditional galvanometers usually use optical sensors to achieve superior position accuracy. Due to the drawbacks of poor anti-interference characteristic and their poor accuracy at high temperature and during vibration, the anti-interference characteristic and high-precision positioning characteristic of galvanometers are limited. This paper proposes a new mechanical structure based on differential eddy current sensors. High-performance motion control is the core requirement of galvanometers, but there are uncertainties and nonlinear factors in motion-control systems that restrict the improvement in their performance. This study uses fractional order theory and active disturbance rejection controller to achieve high-speed motion-control strategy. The new type of scanning galvanometer is designed as the experimental platform to test the proposed strategy. The anti-interference characteristic of the vibrating galvanometer is tested under high temperature and vibration conditions. Build the fast circumferential scanning detection system experimental platform, using the high-speed swing of the scanning galvanometer to achieve compensated imaging. When the horizontal turntable speed is set at 210°/s and the scanning galvanometer speed is 516 degrees °/s, the 80 Hz frame rate can be achieved, maintaining a uniform linear range of 5 ms, and the system imaging is clear. The study verifies the performance improvement of the proposed strategy and method in terms of disturbance rejection.