Supplementary document for Global search algorithms in automated design of starting points for deep-UV lithography objective - 7132190.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.26809291.v3
Primary Topic
Advancements in Photolithography Techniques
Type
article
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Supplementary document for Global search algorithms in automated design of starting points for deep-UV lithography objective - 7132190.pdf

Figshare
Advancements in Photolithography Techniques
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Supplementary document for Global search algorithms in automated design of starting points for deep-UV lithography objective - 7132190.pdf

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Abstract

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Advancements in Photolithography Techniques
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Supplementary document for Global search algorithms in automated design of starting points for deep-UV lithography objective - 7132190.pdf · Figshare (2025) | TGRS Research Map | TGRS