Supplementary document for Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network - 6874670.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.25213298
Primary Topic
Phase-change materials and chalcogenides
Type
article
Field-Weighted Citation Impact
0.00
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Supplementary document for Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network - 6874670.pdf

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Phase-change materials and chalcogenides
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Supplementary document for Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network - 6874670.pdf

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Abstract

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Phase-change materials and chalcogenides
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Supplementary document for Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network - 6874670.pdf · Figshare (2025) | TGRS Research Map | TGRS