Supplementary document for Mask 3D parameter optimization for improving imaging contrast of plasmonic lithography - 6987778.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.25766094
Primary Topic
Advancements in Photolithography Techniques
Type
article
Field-Weighted Citation Impact
0.00
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Supplementary document for Mask 3D parameter optimization for improving imaging contrast of plasmonic lithography - 6987778.pdf

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Advancements in Photolithography Techniques
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Supplementary document for Mask 3D parameter optimization for improving imaging contrast of plasmonic lithography - 6987778.pdf

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Abstract

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Advancements in Photolithography Techniques
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Supplementary document for Mask 3D parameter optimization for improving imaging contrast of plasmonic lithography - 6987778.pdf · Figshare (2025) | TGRS Research Map | TGRS