Supplementary document for High-NA and High-Efficiency Polarization-Based Metalenses with Pitch Size Control Utilizing Silicon-Rich Nitride - 7314699.pdf
Publication Details
- Journal
- Figshare
- Published
- 2025-01-01
- DOI
- https://doi.org/10.6084/m9.figshare.28071122.v2
- Primary Topic
- Semiconductor materials and interfaces
- Type
- article
- Field-Weighted Citation Impact
- 0.00