Supplementary document for Self-consistent optical properties of PEALD-Al₂O₃ thin films - 7425198.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.29120156
Primary Topic
X-ray Diffraction in Crystallography
Type
article
Field-Weighted Citation Impact
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Supplementary document for Self-consistent optical properties of PEALD-Al₂O₃ thin films - 7425198.pdf

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X-ray Diffraction in Crystallography
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Supplementary document for Self-consistent optical properties of PEALD-Al₂O₃ thin films - 7425198.pdf

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Abstract

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X-ray Diffraction in Crystallography
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Supplementary document for Self-consistent optical properties of PEALD-Al₂O₃ thin films - 7425198.pdf · Figshare (2025) | TGRS Research Map | TGRS