Supplementary document for Numerical Study of the Plasmonic Slab Lens for Improving Direct-write Nano Lithography - 6807882.pdf

optimization of the film thickness, and comparison of lithography for the bowknot aperture probe with different PSLs

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.25002014.v3
Primary Topic
Advancements in Photolithography Techniques
Type
article
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Supplementary document for Numerical Study of the Plasmonic Slab Lens for Improving Direct-write Nano Lithography - 6807882.pdf

Figshare
Advancements in Photolithography Techniques
article

Supplementary document for Numerical Study of the Plasmonic Slab Lens for Improving Direct-write Nano Lithography - 6807882.pdf

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Abstract

optimization of the film thickness, and comparison of lithography for the bowknot aperture probe with different PSLs

Figshare
Openalex Percentile: Top 54%
Advancements in Photolithography Techniques
DOISourceOpenAlex
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Supplementary document for Numerical Study of the Plasmonic Slab Lens for Improving Direct-write Nano Lithography - 6807882.pdf · Figshare (2025) | TGRS Research Map | TGRS