Supplementary document for Improved Fabrication of Scalable Hybrid Silicon Nitride – Thin-film Lithium Niobate Electro-optic Modulators - 6273100.pdf
Supplementary document which includes additional figures showing three additional samples of bonded SiN-LN without IPOCs.
Publication Details
- Journal
- Figshare
- Published
- 2025-01-01
- DOI
- https://doi.org/10.6084/m9.figshare.22060634
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00