Supplementary document for Mid-infrared silicon photonic phase shifter based on microelectromechanical systems - 6102202.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.21347739.v4
Primary Topic
Photonic and Optical Devices
Type
article
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Supplementary document for Mid-infrared silicon photonic phase shifter based on microelectromechanical systems - 6102202.pdf

Figshare
Photonic and Optical Devices
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Supplementary document for Mid-infrared silicon photonic phase shifter based on microelectromechanical systems - 6102202.pdf

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Supplementary document for Mid-infrared silicon photonic phase shifter based on microelectromechanical systems - 6102202.pdf · Figshare (2025) | TGRS Research Map | TGRS