Supplementary document for Experimental Demonstration of Supercell Photonic Crystal in Super-resolution Photolithography - 7490099.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.29170448.v2
Primary Topic
Photonic Crystals and Applications
Type
article
Field-Weighted Citation Impact
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Supplementary document for Experimental Demonstration of Supercell Photonic Crystal in Super-resolution Photolithography - 7490099.pdf

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Photonic Crystals and Applications
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Supplementary document for Experimental Demonstration of Supercell Photonic Crystal in Super-resolution Photolithography - 7490099.pdf

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Photonic Crystals and Applications
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Supplementary document for Experimental Demonstration of Supercell Photonic Crystal in Super-resolution Photolithography - 7490099.pdf · Figshare (2025) | TGRS Research Map | TGRS