Supplementary document for A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling an phase - 6216392.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.21770828
Primary Topic
Photonic and Optical Devices
Type
article
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Supplementary document for A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling an phase - 6216392.pdf

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Photonic and Optical Devices
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Supplementary document for A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling an phase - 6216392.pdf

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Supplementary document for A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling an phase - 6216392.pdf · Figshare (2025) | TGRS Research Map | TGRS