Supplementary document for High-speed lateral-scanning white-light interferometry for etched arrays with vertical off-axis compensation - 7480247.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.29223692.v2
Primary Topic
Optical measurement and interference techniques
Type
article
Field-Weighted Citation Impact
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Supplementary document for High-speed lateral-scanning white-light interferometry for etched arrays with vertical off-axis compensation - 7480247.pdf

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Optical measurement and interference techniques
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Supplementary document for High-speed lateral-scanning white-light interferometry for etched arrays with vertical off-axis compensation - 7480247.pdf

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Abstract

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Optical measurement and interference techniques
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Supplementary document for High-speed lateral-scanning white-light interferometry for etched arrays with vertical off-axis compensation - 7480247.pdf · Figshare (2025) | TGRS Research Map | TGRS