Data and Analysis used for the calibration of the s-SNOM as described in the publication with DOI: 10.1364/OE.523785

The data was collected as part of a measurement within the Project "Electrical nanoscale metrology in industry" (Horizon 2020 Framework Programme, 20IND12 ELENA). According to the calibration procedure as described in the publication with DOI: 10.1364/OE.523785 a scattering-type scanning nearfield optical microscope (s-SNOM) was calibrated to subsequently measure the permittivity directly. In order to reproduce the calibration the data for Fig. 3 and 4a of this publication are provided. The diagrams in these Figures can be reproduced from the raw measement data , which are also provided, using the enclosed Mathematica - Notebooks. In order to proceed, first the script nsInput20240527.nb needs to be executed, defining the required modules. The raw - data then need to be read in executing the script data4Calibration20240527.nb. Finally, the script configCalibration20240528.nb needs to be executed to define calibration and measured samples. The notebooks Fig3a.nb, Fig3b.nb, Fig3c.nb and Fig3d.nb then outputs the corresponding processed measurement data and plot the diagrams. The permittivity as the end result is obtained by executing Fig4a.nb.