Multifunctional MEMS\nSensors for Measuring Force and\nAcceleration Dependent on Graphene-Induced Nonradiative Transitions

The investigation focuses on a microelectromechanical\nsystem (MEMS)\nforce-acceleration sensor utilizing graphene-induced nonradiative\ntransitions. The research results indicate that the sensor’s\nperformance is highly sensitive to distance, enabling remarkable performance\nwhile downsizing the MEMS sensor. As a force sensor, it has a measurement\nrange of 0–88 nN and a sensitivity of −1.004%/nN. In\nterms of acceleration sensing, it boasts a linear measurement range\nof ±50 g with an optical system sensitivity of 1.131%/nm, a mechanical\nsensitivity of 1.94 nm/g, low cross-axis sensitivity at 0.014%, and\na high accelerometer sensitivity of up to −2.192%/g. Moreover,\nthe sensor can perform long-distance optical charging and detection\nwithout the need for integrated batteries and antennas, making it\nhighly promising for applications in various industries such as microintelligent\ndevices, wearables, biomedicine, the Internet of Things, autonomous\ndriving, and aerospace.