ZettaLith: WSSCB manufacturing process

Detailed manufacturing process for the wafer-scale silicon circuit board (WSSCB) used in ZettaLith and ExaLith

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Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2025-06-12
DOI
https://doi.org/10.5281/zenodo.15645986
Primary Topic
Chronic Myeloid Leukemia Treatments
Type
article
Field-Weighted Citation Impact
0.00
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article

ZettaLith: WSSCB manufacturing process

Zenodo (CERN European Organization for Nuclear Research)
Chronic Myeloid Leukemia Treatments
article

ZettaLith: WSSCB manufacturing process

article en

Abstract

Detailed manufacturing process for the wafer-scale silicon circuit board (WSSCB) used in ZettaLith and ExaLith

Zenodo (CERN European Organization for Nuclear Research)
Zen-Noh (Japan) (JP)
Industry, innovation and infrastructure
Openalex Percentile: Top 36%
Chronic Myeloid Leukemia Treatments
DOIOpen Access PDFOpenAlex
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ZettaLith: WSSCB manufacturing process · Zenodo (CERN European Organization for Nuclear Research) (2025) | TGRS Research Map | TGRS