MEMS mirrors for wearable LiDAR

This article explores the selection and characterization of MEMS mirrors for wearable LiDAR systems, emphasizing energy efficiency, compactness, and performance. MEMS mirrors operating at resonant frequencies were chosen for their minimal energy requirements and stability, despite limitations such as fixed field of view (FoV) and specific resonant frequency constraints. Key parameters, including resonant frequency, field of view, and mirror plate dimensions, were analyzed to identify mirrors capable of maximizing FoV and scanning speed within a compact form factor. Several MEMS mirrors were reviewed, including electrostatic and electromagnetic actuation mechanisms, highlighting their operating principles, scan angles, resonant frequencies, and design trade-offs.