Research Paper: Design and Construction of a Plasma Generation Device Using the Surface Dielectric Barrier Discharge (SDBD) Method in a Laboratory Scale

This article aims to design and construct a plasma generation device using the surface dielectric barrier discharge method (SDBD) on a laboratory scale to produce a stable and uniform atmospheric pressure plasma layer. For this purpose, a copper electrode with a thickness of 100 microns with a comb- like structure was designed and constructed for this system, and a mica sheet with a thickness of 0.5 mm and dimensions of 10 × 10 cm was built to make the dielectric. According to the experimental data and analytical calculations of the constructed SDBD system in working conditions of 3 kV voltage and 12.5 kHz frequency, the consumption power of this system is calculated at 50 watts. Due to the production of stable and uniform plasma created on the dielectric surface and the measured power consumption, this system will be able to be used in various sciences and industries, including surface processing industries.