Tuning refractive index change of SiN

\nWe demonstrate the feasibility of femtosecond laser pulses to tune refractive index of SiNx, enabling direct writing waveguides in SiNx and reconfiguring microring resonators. The refractive index increases with pulse energy and pulse density.\n

Publication Details

Journal
Springer Link (Chiba Institute of Technology)
Published
2024-10-18
DOI
https://doi.org/10.1051/epjconf/202430702021/pdf
Primary Topic
Laser Material Processing Techniques
Type
article
Field-Weighted Citation Impact
0.00
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article

Tuning refractive index change of SiN

Springer Link (Chiba Institute of Technology)
Laser Material Processing Techniques
article

Tuning refractive index change of SiN

article en

Abstract

\nWe demonstrate the feasibility of femtosecond laser pulses to tune refractive index of SiNx, enabling direct writing waveguides in SiNx and reconfiguring microring resonators. The refractive index increases with pulse energy and pulse density.\n

Springer Link (Chiba Institute of Technology)
Openalex Percentile: Top 63%
Laser Material Processing Techniques
DOIOpen Access PDFOpenAlex
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Tuning refractive index change of SiN · Springer Link (Chiba Institute of Technology) (2024) | TGRS Research Map | TGRS