High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale

We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biological samples at the nanoscale.

Publication Details

Journal
Springer Link (Chiba Institute of Technology)
Published
2024-10-18
DOI
https://doi.org/10.1051/epjconf/202430703001/pdf
Primary Topic
Photonic Crystal and Fiber Optics
Type
article
Field-Weighted Citation Impact
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article

High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale

Springer Link (Chiba Institute of Technology)
Photonic Crystal and Fiber Optics
article

High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale

article en

Abstract

We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biological samples at the nanoscale.

Springer Link (Chiba Institute of Technology)
Affordable and clean energy
Openalex Percentile: Top 67%
Photonic Crystal and Fiber Optics
DOISourceOpenAlex
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High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale · Springer Link (Chiba Institute of Technology) (2024) | TGRS Research Map | TGRS