SAW pressure sensor based on 128° Y-X-cut lithium niobate ferroelectric thin film with XGBoost temperature compensation

Pressure sensing is a fundamental aspect of industrial production where precise measurement of pressure in real time is essential. In this paper, we propose a surface acoustic wave (SAW) pressure sensor based on a 4 inch 128° Y-X-cut silicon-based single-crystal LiNbO3 film. Resonant frequency was measured as 91.66575 MHz at atmospheric pressure. The devices were capable of high sensitivity of 1027.32 ppm/MPa at 100 °C with linear behavior over the 0–100 kPa. And using XGBoost (eXtreme Gradient Boosting) to realize the temperature compensation calculation, the average error of the temperature compensation algorithm is 0.63% F.S. which serves to demonstrate the efficacy of this method. Based on its high sensitivity and high precision, the sensor has great prospects in the field of industrial production.