In-situ assessment of laser-chemically machined surfaces by means of an indirect optical measurement approach and scanning confocal fluorescence microscopy

\nThe manufacturing rate of laser-chemical machining (LCM) is limited to avoid disruptive boiling bubbles in the process fluid. Adjustments to e.g. the laser beam or the fluid properties can increase the removal rate. However, the existing understanding of the surface removal mechanisms is insufficient to ensure the removal quality under these conditions. Thus, near-process measurements of the surface geometry and the surface temperature are required for an improved process modeling. Due to the complex process environment, no suitable in-process measurement technique for the geometry or surface temperature exists so far. This contribution presents an indirect geometry measurement approach based on scanning confocal fluorescence microscopy that is integrated into the LCM plant. As a result, it is shown that the approx. 200 μm deep micro-geometry of laser-chemically processed surfaces can be indirectly measured in-situ, i.e. inside the LCM system. The realized setup is designed in such a way that in future it will be additionally possible to measure the temperature by means of the fluorescence life-time.\n