Synergistic enhancement of SERS and superhydrophobicity on Si micropatterns fabricated with two-beam laser interference lithography

• Integration of SERS and superhydrophobicity on SiMPs via two-beam laser interference lithography. • Superhydrophobic SiMPs enhance SERS stability and measurement reproducibility by preventing contamination. • Dual-functional platform enables biosensing, environmental monitoring, and self-cleaning with advanced material solutions. This study introduces a novel approach for enhancing both surface-enhanced Raman scattering (SERS) sensitivity and super-hydrophobicity of silicon micropatterns (SiMPs) fabricated through two-beam laser interference lithography (TBLIL). By integrating micro/nanostructured Si surfaces with superior SERS performance and hydrophobic properties, this platform holds promise for advanced sensing and self-cleaning applications. The TBLIL method offers precise control over micropattern geometry and periodicity, creating localized “hot spots” that amplify the Raman signals, facilitating the detection of low-concentration analytes with high sensitivity. Additionally, the microstructured surface ensures superhydrophobicity, prevents contamination, and enhances the stability and reproducibility of SERS measurements. Characterization techniques, including scanning electron microscopy (SEM), Atomic force microscope (AFM), Raman spectroscopy, and contact angle measurements, confirmed significant improvements in the SERS sensitivity and durability of the superhydrophobic surface. This dual-functional platform opens new avenues in biosensing, environmental monitoring, and surface coatings, offering a versatile solution to challenges in materials science and nanotechnology.