Tunable ResonantInvisibility of All-Dielectric Metasurfaceson a Stretchable Substrate: Implications for Highly Sensitive Opto-MechanicalModulators

Stretchable all-dielectric metasurfaces can create their own niche among the whole variety of reconfigurable optical metasurfaces. Their feature should be a combination of high sensitivity to nanoscopic deformations and the possibility of their long-range detection. To achieve the stated functionality, in this work, we studied the excitation of quasi-trapped octupole modes in metasurfaces composed of silicon disks with a split and placed on stretchable low refractive index substrates. By tuning the initial geometric parameters to high-<i>Q</i> spectral feature of the metasurface, we demonstrate resonant modulation of the light transmission coefficient close to 100% (invisibility effect) within small, about of 20 nanometers, linear deformations of the split in disks and metasurface’s period occurring simultaneously. The proposed strategy may have the broadest prospects for its application in the creation of optomechanical modulators and in precision optical metrology, LiDAR technologies, microfluidics, and nanobio- and chemical sensing.