STUDIES OF PLASMA-ENHANCED ATOMIC LAYER DEPOSITION USING A QUARTZ CRYSTAL MICROBALANCE
Institutions
- Cornell University (US)
Publication Details
- Journal
- eCommons (Cornell University)
- Published
- 2024-10-16
- DOI
- https://doi.org/10.7298/2cv2-zc53
- Primary Topic
- Electrophoretic Deposition in Materials Science
- Type
- article
- Field-Weighted Citation Impact
- 0.00