Effect of Parameters on Thin Film Coating Using Sputtering Method: A Comprehensive Review
The present research paper is devoted to the detailed description of the multiple relations between magnetron sputtering parameter characteristics and their consequences for thin film coatings. The research convincingly demonstrates how this parameters relate to each other. It sufficiently explores how changes in sputtering power, gas flow rate, substrate transfer, coating thickness, and deposition time affect the structure, optical, electrical, and mechanical characteristics of multiple thin film groups. The survey of recent related articles shows that many researchers have already confirmed that each of these parameters influences the film properties as well as its crystallinity, smoothness, light transmittance, conductivity and hardness. Thus, there is enough information to show that by changing these parameters in the sputtering process, researchers can manipulate the film characteristics allowing its use in different spheres such as the electronic, optical, or biomedical. The paper underscores the importance of comprehensive optimization of thin film performance, mechanistically resultant from a multitude of underlying parameters since they are mutually interdependent trends. The research is simply instrumental to scientists and engineers working with thin-film coatings as far afield as the newest of hi-tech applications, including but not limited to photovoltaics and medical implants technology where further breakthroughs are now only just ahead.
Publication Details
- Journal
- Zenodo (CERN European Organization for Nuclear Research)
- Published
- 2025-04-25
- DOI
- https://doi.org/10.5281/zenodo.15282346
- Primary Topic
- Metal and Thin Film Mechanics
- Type
- article
- Field-Weighted Citation Impact
- 0.00