Effect of Parameters on Thin Film Coating Using Sputtering Method: A Comprehensive Review

The present research paper is devoted to the detailed description of the multiple relations between magnetron sputtering parameter characteristics and their consequences for thin film coatings. The research convincingly demonstrates how this parameters relate to each other. It sufficiently explores how changes in sputtering power, gas flow rate, substrate transfer, coating thickness, and deposition time affect the structure, optical, electrical, and mechanical characteristics of multiple thin film groups. The survey of recent related articles shows that many researchers have already confirmed that each of these parameters influences the film properties as well as its crystallinity, smoothness, light transmittance, conductivity and hardness. Thus, there is enough information to show that by changing these parameters in the sputtering process, researchers can manipulate the film characteristics allowing its use in different spheres such as the electronic, optical, or biomedical. The paper underscores the importance of comprehensive optimization of thin film performance, mechanistically resultant from a multitude of underlying parameters since they are mutually interdependent trends. The research is simply instrumental to scientists and engineers working with thin-film coatings as far afield as the newest of hi-tech applications, including but not limited to photovoltaics and medical implants technology where further breakthroughs are now only just ahead.

Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2025-04-25
DOI
https://doi.org/10.5281/zenodo.15282346
Primary Topic
Metal and Thin Film Mechanics
Type
article
Field-Weighted Citation Impact
0.00
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article

Effect of Parameters on Thin Film Coating Using Sputtering Method: A Comprehensive Review

Zenodo (CERN European Organization for Nuclear Research)
Metal and Thin Film Mechanics
article

Effect of Parameters on Thin Film Coating Using Sputtering Method: A Comprehensive Review

article en

Abstract

The present research paper is devoted to the detailed description of the multiple relations between magnetron sputtering parameter characteristics and their consequences for thin film coatings. The research convincingly demonstrates how this parameters relate to each other. It sufficiently explores how changes in sputtering power, gas flow rate, substrate transfer, coating thickness, and deposition time affect the structure, optical, electrical, and mechanical characteristics of multiple thin film groups. The survey of recent related articles shows that many researchers have already confirmed that each of these parameters influences the film properties as well as its crystallinity, smoothness, light transmittance, conductivity and hardness. Thus, there is enough information to show that by changing these parameters in the sputtering process, researchers can manipulate the film characteristics allowing its use in different spheres such as the electronic, optical, or biomedical. The paper underscores the importance of comprehensive optimization of thin film performance, mechanistically resultant from a multitude of underlying parameters since they are mutually interdependent trends. The research is simply instrumental to scientists and engineers working with thin-film coatings as far afield as the newest of hi-tech applications, including but not limited to photovoltaics and medical implants technology where further breakthroughs are now only just ahead.

Zenodo (CERN European Organization for Nuclear Research)
Openalex Percentile: Top 53%
Metal and Thin Film Mechanics
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Effect of Parameters on Thin Film Coating Using Sputtering Method: A Comprehensive Review · Zenodo (CERN European Organization for Nuclear Research) (2025) | TGRS Research Map | TGRS