Computational Lithography Simulation Code and Data for "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography"

This release contains codes of mbhl package and notebooks for reproducing computational lithography simulations in Nat. Commun. accepted version for manuscript NCOMMS-24-51170 "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography".

Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2025-03-07
DOI
https://doi.org/10.5281/zenodo.14986965
Citations
1
Primary Topic
Nanofabrication and Lithography Techniques
Type
article
Field-Weighted Citation Impact
0.67
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article

Computational Lithography Simulation Code and Data for "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography"

1 citations
Zenodo (CERN European Organization for Nuclear Research)
Nanofabrication and Lithography Techniques
0.67
article

Computational Lithography Simulation Code and Data for "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography"

article en
1 citations

Abstract

This release contains codes of mbhl package and notebooks for reproducing computational lithography simulations in Nat. Commun. accepted version for manuscript NCOMMS-24-51170 "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography".

Zenodo (CERN European Organization for Nuclear Research)
Openalex Percentile: Top 24%
Nanofabrication and Lithography Techniques
0.67
DOIOpen Access PDFOpenAlex
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Computational Lithography Simulation Code and Data for "Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography" · Zenodo (CERN European Organization for Nuclear Research) (2025) | TGRS Research Map | TGRS