Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films

Publication Details

Published
2025-04-17
DOI
https://doi.org/10.24406/publica-r-234490
Primary Topic
Diamond and Carbon-based Materials Research
Type
article
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article

Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films

Diamond and Carbon-based Materials Research
article

Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films

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Abstract

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Diamond and Carbon-based Materials Research
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Plasma parameter investigation during plasma-enhanced chemical vapor deposition of silicon-containing diamond-like carbon films · (2025) | TGRS Research Map | TGRS