Parameter Optimization\nof Semiconductor Gas Sensor\nunder AC Impedance Measurement

Semiconductor gas sensors were confirmed to perform high\nlinearity\nand a stable baseline under alternating current (AC) impedance measurements.\nHowever, a procedure to determine the optimal parameters of AC impedance\nmeasurements is still lacking. Taking the detection of SF<sub>6</sub> decomposition gas as an example, this work has established a model\nof semiconductor gas sensors under AC impedance measurement. Employing\nfour types of sensors to detect three gases (H<sub>2</sub>S, SO<sub>2</sub>, and CO), the effectiveness of the optimization method has\nbeen validated, as well. With the high linearity and stable baseline\nobtained from AC impedance measurement, it enables rapid correction\nof temperature drift within environmental temperatures ranging from\n10 to 30 °C. Overall, the proposed method can provide a novel\napproach to inhibit the drift failure of semiconductor gas sensors.