Microfilm-Formation\nof High-Viscosity Liquids by Blade\nShear Coating

The distribution of high-viscosity microfilms in designated\nregions\nis crucial for the performance and durability of MEMS devices. This\npaper presents a novel method for controllable film formation in the\nmilli/micron region by blade coating. A microfilm can be formed without\nviscosity limitation, and the formation process can be monitored only\nvia a one-dimensional force sensor. The dynamics of the blade-coating\nprocess are analyzed in detail. The experimental results indicate\nthat the initial height of the blade gap is the determining factor\nof film thickness, whereas the film length can be adjusted individually\nby the scratching speed without influence on film thickness. Moreover,\nthe tangential force varies obviously in different coating parameters\nwhile exhibiting a similar trend.