Supplement Response
Supplementary Information: High-quality Temperature-complementary Bulk Acoustic Wave Resonators Fabricated with Strippable Single-crystalline AlN Films Grown on Sapphire
Publication Details
- Journal
- Figshare
- Published
- 2024-11-18
- DOI
- https://doi.org/10.60893/figshare.apl.27302853.v1
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00