Supplementary document for NANOFABRICATION AND PROFILE TAILORING OF HIGH INDEX TA₂O₅ OPTICAL GRATINGS FOR LIDAR USING C₄F₈/SF₆ PLASMA MIXTURES - 7352490.pdf

1. Chamber conditioning and repeatability2. Parametrization of SEM profiles3. Sensitivity Analysis4. Dry Etching of 2D gratings5. Uniformity measurement

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.28212413.v1
Primary Topic
Optical Coatings and Gratings
Type
article
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article

Supplementary document for NANOFABRICATION AND PROFILE TAILORING OF HIGH INDEX TA₂O₅ OPTICAL GRATINGS FOR LIDAR USING C₄F₈/SF₆ PLASMA MIXTURES - 7352490.pdf

Figshare
Optical Coatings and Gratings
article

Supplementary document for NANOFABRICATION AND PROFILE TAILORING OF HIGH INDEX TA₂O₅ OPTICAL GRATINGS FOR LIDAR USING C₄F₈/SF₆ PLASMA MIXTURES - 7352490.pdf

article en

Abstract

1. Chamber conditioning and repeatability2. Parametrization of SEM profiles3. Sensitivity Analysis4. Dry Etching of 2D gratings5. Uniformity measurement

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Supplementary document for NANOFABRICATION AND PROFILE TAILORING OF HIGH INDEX TA₂O₅ OPTICAL GRATINGS FOR LIDAR USING C₄F₈/SF₆ PLASMA MIXTURES - 7352490.pdf · Figshare (2025) | TGRS Research Map | TGRS