Supplementary document for Prior–primed deep neural network based EUV mask inspection - 7398239.pdf

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.28513172.v2
Primary Topic
Advancements in Photolithography Techniques
Type
article
Field-Weighted Citation Impact
0.00
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Supplementary document for Prior–primed deep neural network based EUV mask inspection - 7398239.pdf

Figshare
Advancements in Photolithography Techniques
article

Supplementary document for Prior–primed deep neural network based EUV mask inspection - 7398239.pdf

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Abstract

No abstract available for this paper.
Figshare
Openalex Percentile: Top 57%
Advancements in Photolithography Techniques
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Supplementary document for Prior–primed deep neural network based EUV mask inspection - 7398239.pdf · Figshare (2025) | TGRS Research Map | TGRS