Supplementary document for Ultraviolet to mid-infrared optical properties of sputtered AlScN-on-SiO2 thin films for integrated photonic applications - 7252460.pdf
Publication Details
- Journal
- Figshare
- Published
- 2025-01-01
- DOI
- https://doi.org/10.6084/m9.figshare.27265320.v3
- Primary Topic
- GaN-based semiconductor devices and materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00