Supplementary document for Femtosecond Laser Printing-Assisted Etching Tailored Hard and Brittle Micro-convex Surface - 6600983.pdf

Process preparation of donor substrate and ICP etching process; the influence mechanism of silanisation; imaging of MCS and its experimental setup; morphology and position deviations distribution of MCS in the array, SEM image of the array.

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.24084222.v3
Primary Topic
Laser Material Processing Techniques
Type
article
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Supplementary document for Femtosecond Laser Printing-Assisted Etching Tailored Hard and Brittle Micro-convex Surface - 6600983.pdf

Figshare
Laser Material Processing Techniques
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Supplementary document for Femtosecond Laser Printing-Assisted Etching Tailored Hard and Brittle Micro-convex Surface - 6600983.pdf

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Abstract

Process preparation of donor substrate and ICP etching process; the influence mechanism of silanisation; imaging of MCS and its experimental setup; morphology and position deviations distribution of MCS in the array, SEM image of the array.

Figshare
Openalex Percentile: Top 56%
Laser Material Processing Techniques
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Supplementary document for Femtosecond Laser Printing-Assisted Etching Tailored Hard and Brittle Micro-convex Surface - 6600983.pdf · Figshare (2025) | TGRS Research Map | TGRS