Supplementary document for Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips - 6003216.pdf

This supplemental document provides additional information on the process flow, the connection between wafer and membrane bow and spectral information regarding the optical analysis.

Publication Details

Journal
Figshare
Published
2025-01-01
DOI
https://doi.org/10.6084/m9.figshare.21545451
Primary Topic
Nanofabrication and Lithography Techniques
Type
article
Field-Weighted Citation Impact
0.00
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Supplementary document for Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips - 6003216.pdf

Figshare
Nanofabrication and Lithography Techniques
article

Supplementary document for Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips - 6003216.pdf

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Abstract

This supplemental document provides additional information on the process flow, the connection between wafer and membrane bow and spectral information regarding the optical analysis.

Figshare
Openalex Percentile: Top 58%
Nanofabrication and Lithography Techniques
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Supplementary document for Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips - 6003216.pdf · Figshare (2025) | TGRS Research Map | TGRS