Organic and Ultraporous Oxide Functional Thin Films by Plasma Technology

The research focuses on the development of coatings and thin films with controlled porous structures through advanced techniques such as remote plasma-assisted vacuum deposition (RPAVD) and soft plasma etching (SPE). These methodologies enable the fabrication of thin films with high porosity, providing them with properties such as increased surface area, low density, and enhanced permeability, making them ideal for applications in catalysis, gas sensors, biomedicine, and as electrodes. Plasma-fabricated ultraporous films offer several advantages over traditional methods, such as the elimination of toxic solvents and reduced processing temperatures, while also allowing for more precise control over the morphology and composition of the materials. A key achievement of this research is the production of aerogel-like metal oxide films (such as TiO₂, VO₂, FeOx) with porosities exceeding 80%, using exclusively plasma-based techniques. This represents a significant advancement, given that previous methods for generating highly porous films required combinations of wet processes, complicating synthesis. The developed approach not only simplifies the procedure but also enables the production of materials with highly tunable optical and electrical properties. Additionally, the study investigates coatings with antireflective and thermochromic properties. The former are designed to minimize light reflection in various optical devices, thereby improving efficiency in photovoltaic systems and other applications. As for the thermochromic coatings, the focus is on materials such as vanadium oxide (VO₂), which can alter their optical properties depending on temperature. These materials are particularly useful in smart windows, which modulate solar radiation to optimize energy efficiency in buildings, reducing energy consumption. Plasma deposition applied to the fabrication of high-porosity materials not only offers precise control over pore morphology, but also the ability to integrate these materials onto complex surfaces and at low temperatures. This is especially advantageous for applications where substrates are heat-sensitive, such as perovskite solar cells and flexible electronic devices. Another relevant aspect of the research is the improvement of perovskite solar cell passivation using ultrathin plasma-deposited polymers, which has been shown to increase the stability and reproducibility of these devices. Passivating the active layers is crucial to preventing material degradation and extending the lifespan of the solar cells. Results have shown that these ultrathin layers effectively protect without compromising electrical performance, marking a significant step toward future commercialization. Regarding the thermochromic VO₂ coatings, the study highlights their ability to modulate near-infrared transmittance while maintaining visible light transparency—an ideal property for smart windows. However, key challenges remain, such as reducing the transition temperature to values closer to room temperature and improving their stability against humidity and environmental degradation. Plasma deposition techniques are confirmed as key tools in the synthesis of functional films and porous oxides for applications in energy, biomedicine, and electronics. These methodologies offer great potential for developing new materials with customizable properties, tailored to the specific needs of each application. Furthermore, their sustainability and scalability make them an attractive option for industry, opening new opportunities for more efficient and environmentally friendly technologies.