NFFA-Europe Pilot - D13.4 - Library of processes based on advanced nano-engineering for TA

In the current document we report on a selection of new processes developed within the NFFA (NEP)project related to advanced nanoengineering for transnational access (TA). They form a new library ofprocess steps enabling new or improved capabilities for some specific nanopatterning. They arecomplementary and generally compatible with state-of-the-art microelectronics industry. Besidesdeveloping the individual core technology, we paid particular attention to novel groupings in a mix-and-match approach to study possible combinations of processes to maximize enabling capabilities fornanosystems manufacturing.