Reactive remote plasma sputtering of functional oxide coatings

Publication Details

Published
2025-01-01
DOI
https://doi.org/10.15126/thesis.901559
Primary Topic
Metal and Thin Film Mechanics
Type
article
Field-Weighted Citation Impact
0.00
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article

Reactive remote plasma sputtering of functional oxide coatings

Metal and Thin Film Mechanics
article

Reactive remote plasma sputtering of functional oxide coatings

article en

Abstract

No abstract available for this paper.
Openalex Percentile: Top 54%
Metal and Thin Film Mechanics
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Reactive remote plasma sputtering of functional oxide coatings · (2025) | TGRS Research Map | TGRS