Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range

\nAn imaging Mueller matrix ellipsometer is used to measure structures in measuring fields in the micrometre range, which are too small for conventional ellipsometry. Line and grid structures are measured and evaluated with the help of numerical simulations using the finite element method to characterize the structure parameters.\n

Publication Details

Journal
Springer Link (Chiba Institute of Technology)
Published
2024-10-31
DOI
https://doi.org/10.1051/epjconf/202430902010/pdf
Primary Topic
Optical Polarization and Ellipsometry
Type
article
Field-Weighted Citation Impact
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article

Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range

Springer Link (Chiba Institute of Technology)
Optical Polarization and Ellipsometry
article

Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range

article en

Abstract

\nAn imaging Mueller matrix ellipsometer is used to measure structures in measuring fields in the micrometre range, which are too small for conventional ellipsometry. Line and grid structures are measured and evaluated with the help of numerical simulations using the finite element method to characterize the structure parameters.\n

Springer Link (Chiba Institute of Technology)
Openalex Percentile: Top 73%
Optical Polarization and Ellipsometry
DOIOpen Access PDFOpenAlex
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Imaging Mueller matrix ellipsometry measurements on measuring fields in the micrometre range · Springer Link (Chiba Institute of Technology) (2024) | TGRS Research Map | TGRS