Modulating\nIon Deposition and Crystallization of Sputtered\nPerovskite Films for Efficient and Stable Solar Cells

Perovskite films with excellent photoelectric properties\nplay a\nsignificant role in fabricating high-performance solar cells. Magnetron\nsputtering is a commercially available and highly reliable technique\nthat is highly attractive for applications in the production of perovskite\nfilms. Here, the ion deposition of the step-by-step sputtering process\nand the continuous sputtering process was systematically explored\nto realize the controlled ion deposition and crystallization of sputtered\nperovskite films. We found that the deposition rate of organic components\nin the initial sputtering stage is greater than that of inorganic\ncomponents, leading to the ion ratio of perovskite thin films being\naccurately regulated by adjusting the sputtering time. Furthermore,\nthe injected content of methylammonium bromide will significantly\naffect the ion ratios and crystal structures of the sputtered perovskite\nfilms. The efficiency and stability of sputtered perovskite solar\ncells can be enhanced significantly by optimizing the sputtered processes\nand improving the crystallization, which lay a solid foundation for\nfurther study of the preparation of perovskite solar cells by magnetron\nsputtering.