Shape Retrieval of\nAzopolymer Surface Relief Gratings\nfrom Diffraction Efficiency Measurement

Azopolymers have enormous potential as real-time materials\nfor\nlithography. Light-induced surface deformations in these polymers\nenable single-step surface patterning, offering the possibility of\nfabricating reconfigurable diffractive optical components like gratings.\nWhile real-time measurement of the surface geometry is inherently\npossible, previous methods have relied on complex instruments. Conversely,\nsimple approaches based on real-time diffraction efficiency measurements\nof a probing light beam have provided only qualitative estimates of\nthe inscription process. Here, we propose a diffraction-based method\nfor the accurate real-time reconstruction of surface relief gratings\ninscribed on azopolymer films. Our method relies on the acquisition\nof the diffraction pattern of a probe beam during the SRG formation,\nand we allowed for surface geometry reconstruction through Fourier\ndecomposition with residual error below 3% and 50 ms temporal resolution.\nOur all-optical approach, directly integrable in any experimental\nconfiguration, provides direct access to the SRG inscription process,\nenabling real-time feedback for on-demand dynamic surfaces.

Publication Details

Journal
Figshare
Published
2024-12-25
DOI
https://doi.org/10.1021/acsaom.4c00462.s001
Primary Topic
Nanofabrication and Lithography Techniques
Type
article
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article

Shape Retrieval of\nAzopolymer Surface Relief Gratings\nfrom Diffraction Efficiency Measurement

Figshare
Nanofabrication and Lithography Techniques
article

Shape Retrieval of\nAzopolymer Surface Relief Gratings\nfrom Diffraction Efficiency Measurement

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Abstract

Azopolymers have enormous potential as real-time materials\nfor\nlithography. Light-induced surface deformations in these polymers\nenable single-step surface patterning, offering the possibility of\nfabricating reconfigurable diffractive optical components like gratings.\nWhile real-time measurement of the surface geometry is inherently\npossible, previous methods have relied on complex instruments. Conversely,\nsimple approaches based on real-time diffraction efficiency measurements\nof a probing light beam have provided only qualitative estimates of\nthe inscription process. Here, we propose a diffraction-based method\nfor the accurate real-time reconstruction of surface relief gratings\ninscribed on azopolymer films. Our method relies on the acquisition\nof the diffraction pattern of a probe beam during the SRG formation,\nand we allowed for surface geometry reconstruction through Fourier\ndecomposition with residual error below 3% and 50 ms temporal resolution.\nOur all-optical approach, directly integrable in any experimental\nconfiguration, provides direct access to the SRG inscription process,\nenabling real-time feedback for on-demand dynamic surfaces.

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Nanofabrication and Lithography Techniques
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