BioinspiredSensor and Actuator Hybrid Pixel Arrayfor Moisture/Temperature Mapping, Electrothermal Display and ProgrammableDeformation

Natural soft organisms with sophisticated perception and deformation abilities provide inspiration for developing flexible electronics. However, the development of flexible sensing and actuating hybrid systems remains a challenge. Herein, we report a bioinspired sensor and actuator hybrid pixel array (SA-HPA) that enables moisture/temperature mapping, electrothermal display, and programmable electrothermal deformation. The SA-HPA is fabricated by femtosecond laser patterning of Cu electrodes/circuits, controllable deposition of graphene, selective encapsulation, and liquid crystal elastomer integration. The versatile SA-HPA can work as a sensor array for temperature and moisture recognition, and the interference between them can be overcome by the selective encapsulation of adjacent pixels. Additionally, SA-HPAs can also serve as electrothermal pixels for programmable infrared display and actuation. As a proof-of-concept, a soft robotic system that enables active temperature and humidity sensing was demonstrated. We deem that the SA-HPA may provide a new paradigm for developing soft electronics.