Angular resolution enhancement of electron backscatter diffraction patterns

We present a simple 'shift and add' based improvement in the angular resolution of single electron backscatter diffraction (EBSD) patterns. Sub-pixel image registration is used to measure the (sub-pixel) difference in projection parameters for patterns collected within a map, and then the pattern is shifted and added together. The resultant EBSD-pattern is shown to contain more angular information than a long-exposure single pattern, via 2D Fast Fourier Transform (FFT)-based analysis. In particular, this method has the potential to enhance the scope of small compact direct electron detectors (DEDs).

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Publication Details

Journal
Ultramicroscopy
Published
2025-12-21
DOI
https://doi.org/10.1016/j.ultramic.2025.114304
Primary Topic
Electron and X-Ray Spectroscopy Techniques
Type
article
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article

Angular resolution enhancement of electron backscatter diffraction patterns

Ultramicroscopy
Electron and X-Ray Spectroscopy Techniques
article

Angular resolution enhancement of electron backscatter diffraction patterns

article en

Abstract

We present a simple 'shift and add' based improvement in the angular resolution of single electron backscatter diffraction (EBSD) patterns. Sub-pixel image registration is used to measure the (sub-pixel) difference in projection parameters for patterns collected within a map, and then the pattern is shifted and added together. The resultant EBSD-pattern is shown to contain more angular information than a long-exposure single pattern, via 2D Fast Fourier Transform (FFT)-based analysis. In particular, this method has the potential to enhance the scope of small compact direct electron detectors (DEDs).

UltramicroscopyVol. 281
University of British Columbia Hospital (CA), University of British Columbia (CA)
Openalex Percentile: Top 62%
Electron and X-Ray Spectroscopy Techniques
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