A Single-Layer Full-Color Diffractive Waveguide by Lithography

Augmented reality (AR) near-eye displays (NEDs) couple microdisplay image light to the human eye via integrated optical modules, enabling seamless virtual-real fusion. As core components that synergistically transmit and diffract light, diffractive waveguides are promising for next-generation AR NEDs but face two bottlenecks: compromised full-color performance in single-layer structures caused by grating dispersion and lack of scalable fabrication technologies. To address these, we first propose a mass-production-compatible workflow based on deep ultraviolet (DUV) lithography for large-area nanostructured optics. This workflow enables high-precision wafer-level production with 200 mm wafers and nine dies per wafer, overcomes scalability issues, and is fully compatible with straight-configuration nanostructures to ensure manufacturing feasibility. Leveraging this workflow, we develop a single-layer diffractive waveguide system for AR NEDs, which comprises a thin glass substrate, a broadband high-efficiency multi-layer dielectric in-coupler, and a 2D out-coupler that concurrently expands and out-couples light. Rigorous coupled wave analysis (RCWA) optimized coupler diffraction, while ray tracing refined guided light intensity and significantly improved exit pupil uniformity. This work establishes a foundation for full-color, high-efficiency AR waveguides and provides a scalable paradigm for large-area nanostructured optical systems such as telescopes and lithography equipment.