Atomically Thin ITO Transistor Matrix for Monolithic Integration of Ultrabright Micro-LED Displays
The realization of ultrabright Micro-LED displays critically depends on the ability of backplane driving circuits to deliver high current densities to each pixel. Here, we report a high-performance transistor technology based on ultrathin indium tin oxide (ITO), which offers superior electrical properties compared to conventional TFT backplane. To address the challenge of high carrier concentration in ITO─typically manifesting as a degenerate semiconductor─we introduce a controllable in situ oxidation and thickness regulation process to modulate the doping concentration. The optimized ITO TFT backplanes are monolithically integrated with Micro-LED chips at the wafer level, contributing 8.4% of the total power consumption for the integrated microdisplay. Luminance values of 3.7 × 10<sup>6</sup> nits for blue and 1.6 × 10<sup>7</sup> nits for green emission are also achieved, meeting the demands of high-brightness applications. This work presents a new strategy for high-current-density Micro-LED driving and provides a practical pathway toward scalable, ultrabright microdisplay technologies.
Authors
- Ziyang Gan (ORCID: https://orcid.org/0000-0001-5707-5765)
- Qijun Zong (ORCID: https://orcid.org/0009-0004-1199-8774)
- Xu Chen (ORCID: https://orcid.org/0000-0002-9870-7287)
- Weihuang Xiao
- Kexin Hao (ORCID: https://orcid.org/0000-0001-7332-1436)
- Haifeng Wu (ORCID: https://orcid.org/0000-0002-7548-923X)
- Jian Hu (ORCID: https://orcid.org/0000-0002-8349-6595)
- Bobo Tian (ORCID: https://orcid.org/0000-0002-4251-2755)
- Xudong Yang (ORCID: https://orcid.org/0000-0001-7280-345X)
- Yizhe Wang
- Anlian Pan (ORCID: https://orcid.org/0000-0003-3335-3067)
- Junjie Zhang (ORCID: https://orcid.org/0009-0008-4931-7208)
- Dong Li (ORCID: https://orcid.org/0000-0003-0391-7060)
- Xiao Wang (ORCID: https://orcid.org/0000-0002-2973-8215)
- Ziwei Li
- Sitong Chen (ORCID: https://orcid.org/0000-0002-7961-5053)
- Xiaoqin Liao
- Xiaoming Zhao (ORCID: https://orcid.org/0000-0001-7801-6887)
Institutions
- Hunan University (CN)
- Hunan Normal University (CN)
- Integrated Optoelectronics (Norway) (NO)
- Cloud Computing Center (CN)
- Shenzhen Technology University (CN)
- State Key Laboratory of Chemobiosensing and Chemometrics (CN)
- East China Normal University (CN)
Publication Details
- Journal
- Nano Letters
- Published
- 2025-12-18
- DOI
- https://doi.org/10.1021/acs.nanolett.5c05130
- Primary Topic
- Thin-Film Transistor Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00