Numerical investigation for discharge characteristics of a KrCl-excilamp under condition of local energy approximation

An alternative numerical investigation is carried out to analyze the discharge characteristics of the KrCl-excilamp under local energy approximation. A one-dimensional model consisting of the continuity equation, equation for external circuit model, Kr/Cl2 plasma chemistry is applied to the KrCl-excilamp driven by a sinusoidal alternating high voltage-power supply at 5 kV with a frequency of 48.7 kHz. The spatiotemporal characteristics of species concentration and the influence of the chlorine concentration on the radiation efficiency of the dielectric-barrier discharge KrCl-excilamp are evaluated. The KrCl* density reaches a maximum value in near the dielectric surface and predominant reaction path of the formation of KrCl* is harpoon reactions of Kr*(Kr2*). The radiation efficiency reaches a maximum value at Cl2 concentrations of 0.5% and the total pressure 20–26 kPa. The 60% of the power deposited in discharge is dissipated by the electron, which is responsible for the production of KrCl*. Then, the model validity is checked by comparing the results with the experimental and the numerical values in literature structures. The simulation results based on the local energy approximation confirm that the experimental values are closer than those based on the local field approximation.

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Publication Details

Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
2025-12-01
DOI
https://doi.org/10.1116/6.0004866
Primary Topic
Plasma Applications and Diagnostics
Type
article
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article

Numerical investigation for discharge characteristics of a KrCl-excilamp under condition of local energy approximation

Rye-Lim Kim, Yong-Jun Kim, Pyong-Sol Ri
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Plasma Applications and Diagnostics
article

Numerical investigation for discharge characteristics of a KrCl-excilamp under condition of local energy approximation

Rye-Lim Kim, Yong-Jun Kim, Pyong-Sol Ri
article en

Abstract

An alternative numerical investigation is carried out to analyze the discharge characteristics of the KrCl-excilamp under local energy approximation. A one-dimensional model consisting of the continuity equation, equation for external circuit model, Kr/Cl2 plasma chemistry is applied to the KrCl-excilamp driven by a sinusoidal alternating high voltage-power supply at 5 kV with a frequency of 48.7 kHz. The spatiotemporal characteristics of species concentration and the influence of the chlorine concentration on the radiation efficiency of the dielectric-barrier discharge KrCl-excilamp are evaluated. The KrCl* density reaches a maximum value in near the dielectric surface and predominant reaction path of the formation of KrCl* is harpoon reactions of Kr*(Kr2*). The radiation efficiency reaches a maximum value at Cl2 concentrations of 0.5% and the total pressure 20–26 kPa. The 60% of the power deposited in discharge is dissipated by the electron, which is responsible for the production of KrCl*. Then, the model validity is checked by comparing the results with the experimental and the numerical values in literature structures. The simulation results based on the local energy approximation confirm that the experimental values are closer than those based on the local field approximation.

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaVol. 43(6)
Kim Chaek University of Technology (KP)
Openalex Percentile: Top 45%
Plasma Applications and Diagnostics
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