Direct phase-compensation method of piezoelectric resonant MEMS scanners through control of driving signal phase and duty cycle

Abstract Piezoelectric actuators are integral to microelectromechanical systems (MEMS) scanners, but phase errors can impair laser scanning accuracy. This study addresses these errors through direct compensation methods, eliminating the need for embedded phase-detection sensors, which complicate fabrication and design. Specifically, we explored the influence of driving-signal modulation on the phase shift between the applied voltage and resulting scanning angle. Our experiments reveal that adjusting the phase difference yields the best compensation, effectively reducing phase error while maintaining scanning performance. These results validate a sensorless approach to improve laser scanning precision in piezoelectric MEMS scanners without added fabrication complexity.