Cu Filling into Seed and Seedless Layered Through-Silicon-Via and Hybrid Bonding for High-Density Semiconductor Packaging
Authors
- Jae Pil Jung (ORCID: https://orcid.org/0000-0002-4526-0442)
- Chae Yeon Lim (ORCID: https://orcid.org/0000-0002-8592-1153)
- Hyun‐Sik Kim (ORCID: https://orcid.org/0000-0001-8934-4042)
- Shin Hui Seon
Institutions
- University of Seoul (KR)
Publication Details
- Journal
- Korean Journal of Materials Research
- Published
- 2025-11-27
- DOI
- https://doi.org/10.3740/mrsk.2025.35.11.511
- Primary Topic
- 3D IC and TSV technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Ministry of Trade, Industry and Energy
- Korea Evaluation Institute of Industrial Technology