单晶硅表面微结构水下纳秒激光烧蚀工艺(特邀)
Authors
- 朱艳丹 ZHU Yandan
- 金锃阳 JIN Zengyang
- 孙国燕 SUN Guoyan
- 张全利 ZHANG Quanli
Publication Details
- Journal
- Infrared and Laser Engineering
- Published
- 2025-01-01
- DOI
- https://doi.org/10.3788/irla20250261
- Primary Topic
- Military Technology and Strategies
- Type
- article
- Field-Weighted Citation Impact
- 0.00