大口径超薄单晶硅红外窗口多工序控形控性抛光(特邀)

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Publication Details

Journal
Infrared and Laser Engineering
Published
2025-01-01
DOI
https://doi.org/10.3788/irla20250264
Primary Topic
Advanced Surface Polishing Techniques
Type
article
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article

大口径超薄单晶硅红外窗口多工序控形控性抛光(特邀)

王斌 WANG Bin, 武兆平 WU Zhaoping, 李金鹏 LI Jinpeng, 董云芬 DONG Yunfen et al.
Infrared and Laser Engineering
Advanced Surface Polishing Techniques
article

大口径超薄单晶硅红外窗口多工序控形控性抛光(特邀)

王斌 WANG Bin, 武兆平 WU Zhaoping, 李金鹏 LI Jinpeng, 董云芬 DONG Yunfen, 李启宇 LI Qiyu, 陆文剑 LU Wenjian
article en

Abstract

No abstract available for this paper.
Infrared and Laser EngineeringVol. 54(9)
Openalex Percentile: Top 61%
Advanced Surface Polishing Techniques
DOISourceOpenAlex
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大口径超薄单晶硅红外窗口多工序控形控性抛光(特邀) — 王斌 WANG Bin, 武兆平 WU Zhaoping, et al. · Infrared and Laser Engineering (2025) | TGRS Research Map | TGRS